NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY

Ph.D

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Bibliographic Details
Main Author:	SARFRAZ QURESHI
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2019
Subjects:	Proton Beam Writing, Nanofabrication, Beam focusing, Imaging, Secondary electrons, Masked Ion Lithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/151261
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-151261
record_format	dspace
spelling	sg-nus-scholar.10635-1512612019-04-11T16:54:13Z NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY SARFRAZ QURESHI PHYSICS VAN KAN, JEROEN ANTON Proton Beam Writing, Nanofabrication, Beam focusing, Imaging, Secondary electrons, Masked Ion Lithography Ph.D DOCTOR OF PHILOSOPHY 2019-01-31T18:09:37Z 2019-01-31T18:09:37Z 2018-08-24 Thesis SARFRAZ QURESHI (2018-08-24). NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/151261 en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Proton Beam Writing, Nanofabrication, Beam focusing, Imaging, Secondary electrons, Masked Ion Lithography
spellingShingle	Proton Beam Writing, Nanofabrication, Beam focusing, Imaging, Secondary electrons, Masked Ion Lithography SARFRAZ QURESHI NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS SARFRAZ QURESHI
format	Theses and Dissertations
author	SARFRAZ QURESHI
author_sort	SARFRAZ QURESHI
title	NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
title_short	NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
title_full	NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
title_fullStr	NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
title_full_unstemmed	NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
title_sort	nanofabrication using optimized proton beam writing and masked ion lithography
publishDate	2019
url	http://scholarbank.nus.edu.sg/handle/10635/151261
_version_	1681099072414416896

NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY

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