CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION

CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION

Master's

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Bibliographic Details
Main Author: KEN LI FUNG YUEN
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Theses and Dissertations
Published: 2019
Subjects:
CMP
polishing pad
planarity
pad profile
conditioning
pad balding
wafer de-chuck
retention time
sweeping
process optimization
Online Access:https://scholarbank.nus.edu.sg/handle/10635/153978
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Institution: National University of Singapore
id sg-nus-scholar.10635-153978
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spelling sg-nus-scholar.10635-1539782019-05-10T13:13:36Z CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION KEN LI FUNG YUEN SINGAPORE-MIT ALLIANCE WONG CHEE CHEONG AHN KI CHEOL CMP polishing pad planarity pad profile conditioning pad balding wafer de-chuck retention time sweeping process optimization Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-10T05:32:00Z 2019-05-10T05:32:00Z 2007 Thesis KEN LI FUNG YUEN (2007). CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153978 SMA BATCHLOAD 20190422
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic CMP
polishing pad
planarity
pad profile
conditioning
pad balding
wafer de-chuck
retention time
sweeping
process optimization
spellingShingle CMP
polishing pad
planarity
pad profile
conditioning
pad balding
wafer de-chuck
retention time
sweeping
process optimization
KEN LI FUNG YUEN
CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
description Master's
author2 SINGAPORE-MIT ALLIANCE
author_facet SINGAPORE-MIT ALLIANCE
KEN LI FUNG YUEN
format Theses and Dissertations
author KEN LI FUNG YUEN
author_sort KEN LI FUNG YUEN
title CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
title_short CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
title_full CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
title_fullStr CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
title_full_unstemmed CHEMICAL MECHANICAL POLISHING PAD PROFILE OPTIMIZATION
title_sort chemical mechanical polishing pad profile optimization
publishDate 2019
url https://scholarbank.nus.edu.sg/handle/10635/153978
_version_ 1681099323102724096

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