ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES

Master's

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Bibliographic Details
Main Author:	MADHAVAN PANDURANGAN
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	Electron beam Proximity effect Back scattering Post exposure bake Sensitivity Chemically amplified resist
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154128
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154128
record_format	dspace
spelling	sg-nus-scholar.10635-1541282019-05-15T13:14:40Z ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES MADHAVAN PANDURANGAN SINGAPORE-MIT ALLIANCE JAGAR SINGH Electron beam Proximity effect Back scattering Post exposure bake Sensitivity Chemically amplified resist Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-15T04:18:26Z 2019-05-15T04:18:26Z 2003 Thesis MADHAVAN PANDURANGAN (2003). ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154128 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Electron beam Proximity effect Back scattering Post exposure bake Sensitivity Chemically amplified resist
spellingShingle	Electron beam Proximity effect Back scattering Post exposure bake Sensitivity Chemically amplified resist MADHAVAN PANDURANGAN ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE MADHAVAN PANDURANGAN
format	Theses and Dissertations
author	MADHAVAN PANDURANGAN
author_sort	MADHAVAN PANDURANGAN
title	ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
title_short	ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
title_full	ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
title_fullStr	ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
title_full_unstemmed	ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES
title_sort	electron beam lithography for sub-100nm devices
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154128
_version_	1681099341525155840

ELECTRON BEAM LITHOGRAPHY FOR SUB-100NM DEVICES

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