CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL

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Main Author:	ONG KNG YIH
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	Trench etching photonic crystal Reactive ion etching vertical profile etch rate passivation
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154137
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154137
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spelling	sg-nus-scholar.10635-1541372019-05-15T13:14:55Z CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL ONG KNG YIH SINGAPORE-MIT ALLIANCE FENG HANHUA Trench etching photonic crystal Reactive ion etching vertical profile etch rate passivation Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-15T04:18:37Z 2019-05-15T04:18:37Z 2004 Thesis ONG KNG YIH (2004). CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154137 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Trench etching photonic crystal Reactive ion etching vertical profile etch rate passivation
spellingShingle	Trench etching photonic crystal Reactive ion etching vertical profile etch rate passivation ONG KNG YIH CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE ONG KNG YIH
format	Theses and Dissertations
author	ONG KNG YIH
author_sort	ONG KNG YIH
title	CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
title_short	CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
title_full	CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
title_fullStr	CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
title_full_unstemmed	CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL
title_sort	characterisation and determination of the etching profile of via/trench of si-based photonic crystal
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154137
_version_	1681099343130525696

CHARACTERISATION AND DETERMINATION OF THE ETCHING PROFILE OF VIA/TRENCH OF SI-BASED PHOTONIC CRYSTAL

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