TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation
Master's
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2019
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sg-nus-scholar.10635-1542192019-05-29T07:18:40Z TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation Ng Khim Hong SINGAPORE-MIT ALLIANCE Pey Kin Leong Lap Chan Eddie Er Dai Jiyan Gerbrand Cede Master's MASTER OF SCIENCE IN ADVANCED MATERIALS 2019-05-17T07:15:09Z 2019-05-17T07:15:09Z 2000 Thesis Ng Khim Hong (2000). TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154219 SMA BATCHLOAD 20190422 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Ng Khim Hong |
| format |
Theses and Dissertations |
| author |
Ng Khim Hong |
| spellingShingle |
Ng Khim Hong TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| author_sort |
Ng Khim Hong |
| title |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_short |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_full |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_fullStr |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_full_unstemmed |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_sort |
tem study of a rto oxide-interfacial layer on epitaxial-cobalt silicide (cosi2) formation |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/154219 |
| _version_ |
1681099353794543616 |