TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation
Master's
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2019
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sg-nus-scholar.10635-1542192024-10-26T00:10:54Z TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation Ng Khim Hong SINGAPORE-MIT ALLIANCE Pey Kin Leong Lap Chan Eddie Er Dai Jiyan Gerbrand Cede Master's MASTER OF SCIENCE IN ADVANCED MATERIALS Thesis Supervisors: 1. Assistant Prof Pey Kin Leong SMA Fellow. 2. Dr Lap Chan, Chartered Semiconductor Manufacturing Ltd. 3. Mr Eddie Er, Chartered Semiconductor Manufacturing Ltd. 4. Dr Dai Jiyan, Chartered Semiconductor Manufacturing Ltd. 5. Assoc Prof Gerbrand Ceder, SMA Fellow 2019-05-17T07:15:09Z 2019-05-17T07:15:09Z 2000 Thesis Ng Khim Hong (2000). TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154219 SMA BATCHLOAD 20190422 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Ng Khim Hong |
| format |
Theses and Dissertations |
| author |
Ng Khim Hong |
| spellingShingle |
Ng Khim Hong TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| author_sort |
Ng Khim Hong |
| title |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_short |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_full |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_fullStr |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_full_unstemmed |
TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation |
| title_sort |
tem study of a rto oxide-interfacial layer on epitaxial-cobalt silicide (cosi2) formation |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/154219 |
| _version_ |
1821181349186240512 |