Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks

• Main Author: VASARLA NAGENDRA SEKHAR
• Other Authors: MECHANICAL ENGINEERING
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: BD (low-k) thin films, Cu/BD stacks, Nanoindentation, Nanoscratch, Mechanical properties, Critical load (Lc).
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/15429
• Institution: National University of Singapore

Master's