Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks

Master's

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Main Author:	VASARLA NAGENDRA SEKHAR
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	BD (low-k) thin films, Cu/BD stacks, Nanoindentation, Nanoscratch, Mechanical properties, Critical load (Lc).
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15429
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15429
record_format	dspace
spelling	sg-nus-scholar.10635-154292015-01-13T21:32:01Z Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks VASARLA NAGENDRA SEKHAR MECHANICAL ENGINEERING SINHA, SUJEET KUMAR TAY AH ONG, ANDREW BD (low-k) thin films, Cu/BD stacks, Nanoindentation, Nanoscratch, Mechanical properties, Critical load (Lc). Master's MASTER OF ENGINEERING 2010-04-08T10:53:27Z 2010-04-08T10:53:27Z 2006-06-05 Thesis VASARLA NAGENDRA SEKHAR (2006-06-05). Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15429 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	BD (low-k) thin films, Cu/BD stacks, Nanoindentation, Nanoscratch, Mechanical properties, Critical load (Lc).
spellingShingle	BD (low-k) thin films, Cu/BD stacks, Nanoindentation, Nanoscratch, Mechanical properties, Critical load (Lc). VASARLA NAGENDRA SEKHAR Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING VASARLA NAGENDRA SEKHAR
format	Theses and Dissertations
author	VASARLA NAGENDRA SEKHAR
author_sort	VASARLA NAGENDRA SEKHAR
title	Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
title_short	Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
title_full	Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
title_fullStr	Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
title_full_unstemmed	Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks
title_sort	nanomechanical characterization of bd (low-k) thin films and cu/bd multilayered stacks
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15429
_version_	1681079193213861888

Nanomechanical characterization of BD (Low-K) thin films and Cu/BD multilayered stacks

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