Optical resolution enhancement techniques and applications in optical lithography

Ph.D

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Bibliographic Details
Main Author:	CHUA GEK SOON
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	resolution enhancement technique; Fraunhofer diffraction; Rayleigh equation; Geometrical theory of diffraction; transmission cross coefficient
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15647
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15647
record_format	dspace
spelling	sg-nus-scholar.10635-156472015-01-11T02:51:03Z Optical resolution enhancement techniques and applications in optical lithography CHUA GEK SOON MECHANICAL ENGINEERING TAY CHO JUI QUAN CHENGGEN resolution enhancement technique; Fraunhofer diffraction; Rayleigh equation; Geometrical theory of diffraction; transmission cross coefficient Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:55:50Z 2010-04-08T10:55:50Z 2007-03-09 Thesis CHUA GEK SOON (2007-03-09). Optical resolution enhancement techniques and applications in optical lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15647 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	resolution enhancement technique; Fraunhofer diffraction; Rayleigh equation; Geometrical theory of diffraction; transmission cross coefficient
spellingShingle	resolution enhancement technique; Fraunhofer diffraction; Rayleigh equation; Geometrical theory of diffraction; transmission cross coefficient CHUA GEK SOON Optical resolution enhancement techniques and applications in optical lithography
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING CHUA GEK SOON
format	Theses and Dissertations
author	CHUA GEK SOON
author_sort	CHUA GEK SOON
title	Optical resolution enhancement techniques and applications in optical lithography
title_short	Optical resolution enhancement techniques and applications in optical lithography
title_full	Optical resolution enhancement techniques and applications in optical lithography
title_fullStr	Optical resolution enhancement techniques and applications in optical lithography
title_full_unstemmed	Optical resolution enhancement techniques and applications in optical lithography
title_sort	optical resolution enhancement techniques and applications in optical lithography
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15647
_version_	1681079229842718720

Optical resolution enhancement techniques and applications in optical lithography

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