OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS
Master's
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| Format: | Theses and Dissertations |
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/158746 |
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sg-nus-scholar.10635-1587462024-10-26T00:49:26Z OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS SHIBU GANGADHARAN ELECTRICAL AND COMPUTER ENGINEERING CHOI WEE KIONG Master's MASTER OF ENGINEERING 2019-09-16T02:37:06Z 2019-09-16T02:37:06Z 2001 Thesis SHIBU GANGADHARAN (2001). OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/158746 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
ELECTRICAL AND COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL AND COMPUTER ENGINEERING SHIBU GANGADHARAN |
| format |
Theses and Dissertations |
| author |
SHIBU GANGADHARAN |
| spellingShingle |
SHIBU GANGADHARAN OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
SHIBU GANGADHARAN |
| title |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
OPTICAL AND OXIDATION STUDIES OF PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
optical and oxidation studies of plasma enhanced chemical vapour deposited amorphous silicon carbide films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/158746 |
| _version_ |
1821209365761228800 |