PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS

Master's

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Bibliographic Details
Main Author: CHEN GEOK LOO
Other Authors: DEPT OF PHYSICS
Format: Theses and Dissertations
Published: 2019
Online Access:https://scholarbank.nus.edu.sg/handle/10635/160544
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Institution: National University of Singapore
Description
Summary:Master's