PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS

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Bibliographic Details
Main Author:	CHEN GEOK LOO
Other Authors:	DEPT OF PHYSICS
Format:	Theses and Dissertations
Published:	2019
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/160544
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-160544
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spelling	sg-nus-scholar.10635-1605442019-10-18T05:59:45Z PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS CHEN GEOK LOO DEPT OF PHYSICS LI YI LIN JIANYI Master's MASTER OF SCIENCE 2019-10-18T05:59:45Z 2019-10-18T05:59:45Z 1999 Thesis CHEN GEOK LOO (1999). PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/160544 CCK BATCHLOAD 20190911
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Master's
author2	DEPT OF PHYSICS
author_facet	DEPT OF PHYSICS CHEN GEOK LOO
format	Theses and Dissertations
author	CHEN GEOK LOO
spellingShingle	CHEN GEOK LOO PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
author_sort	CHEN GEOK LOO
title	PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
title_short	PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
title_full	PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
title_fullStr	PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
title_full_unstemmed	PREPARATION AND CHARACTERIZATION OF REACTIVE RF SPUTTERED NITRIDE THIN FILMS
title_sort	preparation and characterization of reactive rf sputtered nitride thin films
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/160544
_version_	1681100093364633600

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