Dielectric characterization and dopant profile extraction using scanning capacitance microscopy

Ph.D

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Bibliographic Details
Main Author:	WONG KIN MUN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Scanning Capacitance Microscopy Dopant Profile Extraction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16145
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16145
record_format	dspace
spelling	sg-nus-scholar.10635-161452024-10-26T07:23:07Z Dielectric characterization and dopant profile extraction using scanning capacitance microscopy WONG KIN MUN ELECTRICAL & COMPUTER ENGINEERING CHIM WAI KIN Scanning Capacitance Microscopy Dopant Profile Extraction Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T11:01:32Z 2010-04-08T11:01:32Z 2007-04-18 Thesis WONG KIN MUN (2007-04-18). Dielectric characterization and dopant profile extraction using scanning capacitance microscopy. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16145 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Scanning Capacitance Microscopy Dopant Profile Extraction
spellingShingle	Scanning Capacitance Microscopy Dopant Profile Extraction WONG KIN MUN Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING WONG KIN MUN
format	Theses and Dissertations
author	WONG KIN MUN
author_sort	WONG KIN MUN
title	Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
title_short	Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
title_full	Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
title_fullStr	Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
title_full_unstemmed	Dielectric characterization and dopant profile extraction using scanning capacitance microscopy
title_sort	dielectric characterization and dopant profile extraction using scanning capacitance microscopy
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16145
_version_	1821217853497409536

Dielectric characterization and dopant profile extraction using scanning capacitance microscopy

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