Dopant profile extraction and dielectric characterization using scanning capacitance microscopy

Dopant profile extraction and dielectric characterization using scanning capacitance microscopy

Master's

Saved in:
Bibliographic Details
Main Author: YAN JIAN
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2011
Subjects:
scanning capacitance microscopy (SCM), dopant profile extraction, dielectric characterization, silicon dioxide, high dielectric constant
Online Access:http://scholarbank.nus.edu.sg/handle/10635/18893
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/18893

Similar Items