Dopant profile extraction and dielectric characterization using scanning capacitance microscopy

Master's

Saved in:

Bibliographic Details
Main Author:	YAN JIAN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	scanning capacitance microscopy (SCM), dopant profile extraction, dielectric characterization, silicon dioxide, high dielectric constant
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/18893
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-18893
record_format	dspace
spelling	sg-nus-scholar.10635-188932017-10-21T07:52:12Z Dopant profile extraction and dielectric characterization using scanning capacitance microscopy YAN JIAN ELECTRICAL & COMPUTER ENGINEERING CHIM WAI KIN scanning capacitance microscopy (SCM), dopant profile extraction, dielectric characterization, silicon dioxide, high dielectric constant Master's MASTER OF ENGINEERING 2011-01-05T18:00:45Z 2011-01-05T18:00:45Z 2006-01-30 Thesis YAN JIAN (2006-01-30). Dopant profile extraction and dielectric characterization using scanning capacitance microscopy. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/18893 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	scanning capacitance microscopy (SCM), dopant profile extraction, dielectric characterization, silicon dioxide, high dielectric constant
spellingShingle	scanning capacitance microscopy (SCM), dopant profile extraction, dielectric characterization, silicon dioxide, high dielectric constant YAN JIAN Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING YAN JIAN
format	Theses and Dissertations
author	YAN JIAN
author_sort	YAN JIAN
title	Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
title_short	Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
title_full	Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
title_fullStr	Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
title_full_unstemmed	Dopant profile extraction and dielectric characterization using scanning capacitance microscopy
title_sort	dopant profile extraction and dielectric characterization using scanning capacitance microscopy
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/18893
_version_	1681079579242921984

Dopant profile extraction and dielectric characterization using scanning capacitance microscopy

Similar Items