The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon
10.1149/2.0141808jss
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Electrochemical Society Inc.
2020
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sg-nus-scholar.10635-1685942024-04-17T03:20:11Z The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon Liang, H.D. Breese, M.B.H. Duttagupta, S. Aberle, A.G. Bettiol, A.A. Venkatesan, T. NUS NANOSCIENCE & NANOTECH INITIATIVE DEPT OF PHYSICS SOLAR ENERGY RESEARCH INST OF S'PORE ELECTRICAL AND COMPUTER ENGINEERING 10.1149/2.0141808jss ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 7 8 N110-N113 2020-05-28T07:09:59Z 2020-05-28T07:09:59Z 2018-04-01 Article Liang, H.D., Breese, M.B.H., Duttagupta, S., Aberle, A.G., Bettiol, A.A., Venkatesan, T. (2018-04-01). The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 7 (8) : N110-N113. ScholarBank@NUS Repository. https://doi.org/10.1149/2.0141808jss 21628769 https://scholarbank.nus.edu.sg/handle/10635/168594 Electrochemical Society Inc. |
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Singapore Singapore |
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10.1149/2.0141808jss |
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NUS NANOSCIENCE & NANOTECH INITIATIVE |
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NUS NANOSCIENCE & NANOTECH INITIATIVE Liang, H.D. Breese, M.B.H. Duttagupta, S. Aberle, A.G. Bettiol, A.A. Venkatesan, T. |
| format |
Article |
| author |
Liang, H.D. Breese, M.B.H. Duttagupta, S. Aberle, A.G. Bettiol, A.A. Venkatesan, T. |
| spellingShingle |
Liang, H.D. Breese, M.B.H. Duttagupta, S. Aberle, A.G. Bettiol, A.A. Venkatesan, T. The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| author_sort |
Liang, H.D. |
| title |
The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| title_short |
The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| title_full |
The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| title_fullStr |
The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| title_full_unstemmed |
The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| title_sort |
effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon |
| publisher |
Electrochemical Society Inc. |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/168594 |
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1800914017154236416 |