The effect of hydrogen doping on the electrochemical etching of ion/irradiated n/type silicon
10.1149/2.0141808jss
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| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
Electrochemical Society Inc.
2020
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/168594 |
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| Institution: | National University of Singapore |