Temperature sensing and control in multi-zone semiconductor thermal processing
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
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2010
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/17322 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-173222024-10-26T06:17:45Z Temperature sensing and control in multi-zone semiconductor thermal processing YAN HAN ELECTRICAL & COMPUTER ENGINEERING HO WENG KHUEN semiconductor manufacturing, data, statistics, sensor bias, MPC Ph.D DOCTOR OF PHILOSOPHY 2010-06-08T18:00:11Z 2010-06-08T18:00:11Z 2009-08-01 Thesis YAN HAN (2009-08-01). Temperature sensing and control in multi-zone semiconductor thermal processing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/17322 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
semiconductor manufacturing, data, statistics, sensor bias, MPC |
| spellingShingle |
semiconductor manufacturing, data, statistics, sensor bias, MPC YAN HAN Temperature sensing and control in multi-zone semiconductor thermal processing |
| description |
Ph.D |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING YAN HAN |
| format |
Theses and Dissertations |
| author |
YAN HAN |
| author_sort |
YAN HAN |
| title |
Temperature sensing and control in multi-zone semiconductor thermal processing |
| title_short |
Temperature sensing and control in multi-zone semiconductor thermal processing |
| title_full |
Temperature sensing and control in multi-zone semiconductor thermal processing |
| title_fullStr |
Temperature sensing and control in multi-zone semiconductor thermal processing |
| title_full_unstemmed |
Temperature sensing and control in multi-zone semiconductor thermal processing |
| title_sort |
temperature sensing and control in multi-zone semiconductor thermal processing |
| publishDate |
2010 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/17322 |
| _version_ |
1821211998745001984 |