Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film

Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film

10.3390/s18124352

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Bibliographic Details
Main Authors:	Sun, C, Shi, Q, Yazici, M.S, Lee, C, Liu, Y
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Published:	MDPI AG 2020
Subjects:	Atomic force microscopy Chemical sensors Fourier transform infrared spectroscopy Graphene oxide Humidity sensors Piezoelectric transducers Piezoelectricity Scanning electron microscopy Transducers Ultrasonic applications Ultrasonic transducers Array structures Fourier transform infrared spectrum(FTIR) High sensitivity Micro-machined ultrasonic transducer Piezoelectric micromachined ultrasonic transducer (PMUT) Simultaneous detection Temperature coefficient of frequencies Ultrasensitive mass detections Graphene
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/175097
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Institution:	National University of Singapore

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Summary:	10.3390/s18124352