Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film

• Main Authors: Sun, C, Shi, Q, Yazici, M.S, Lee, C, Liu, Y
• Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
• Format: Article
• Published: MDPI AG 2020
• Subjects: Atomic force microscopy; Chemical sensors; Fourier transform infrared spectroscopy; Graphene oxide; Humidity sensors; Piezoelectric transducers; Piezoelectricity; Scanning electron microscopy; Transducers; Ultrasonic applications; Ultrasonic transducers; Array structures; Fourier transform infrared spectrum(FTIR); High sensitivity; Micro-machined ultrasonic transducer; Piezoelectric micromachined ultrasonic transducer (PMUT); Simultaneous detection; Temperature coefficient of frequencies; Ultrasensitive mass detections; Graphene
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/175097
• Institution: National University of Singapore

10.3390/s18124352