Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film

10.3390/s18124352

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Bibliographic Details
Main Authors:	Sun, C, Shi, Q, Yazici, M.S, Lee, C, Liu, Y
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Published:	MDPI AG 2020
Subjects:	Atomic force microscopy Chemical sensors Fourier transform infrared spectroscopy Graphene oxide Humidity sensors Piezoelectric transducers Piezoelectricity Scanning electron microscopy Transducers Ultrasonic applications Ultrasonic transducers Array structures Fourier transform infrared spectrum(FTIR) High sensitivity Micro-machined ultrasonic transducer Piezoelectric micromachined ultrasonic transducer (PMUT) Simultaneous detection Temperature coefficient of frequencies Ultrasensitive mass detections Graphene
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/175097
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-175097
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spelling	sg-nus-scholar.10635-1750972024-04-25T03:36:45Z Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film Sun, C Shi, Q Yazici, M.S Lee, C Liu, Y ELECTRICAL AND COMPUTER ENGINEERING Atomic force microscopy Chemical sensors Fourier transform infrared spectroscopy Graphene oxide Humidity sensors Piezoelectric transducers Piezoelectricity Scanning electron microscopy Transducers Ultrasonic applications Ultrasonic transducers Array structures Fourier transform infrared spectrum(FTIR) High sensitivity Micro-machined ultrasonic transducer Piezoelectric micromachined ultrasonic transducer (PMUT) Simultaneous detection Temperature coefficient of frequencies Ultrasensitive mass detections Graphene 10.3390/s18124352 Sensors (Switzerland) 18 12 4352 2020-09-09T03:43:52Z 2020-09-09T03:43:52Z 2018 Article Sun, C, Shi, Q, Yazici, M.S, Lee, C, Liu, Y (2018). Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film. Sensors (Switzerland) 18 (12) : 4352. ScholarBank@NUS Repository. https://doi.org/10.3390/s18124352 1424-8220 https://scholarbank.nus.edu.sg/handle/10635/175097 MDPI AG Unpaywall 20200831
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Atomic force microscopy Chemical sensors Fourier transform infrared spectroscopy Graphene oxide Humidity sensors Piezoelectric transducers Piezoelectricity Scanning electron microscopy Transducers Ultrasonic applications Ultrasonic transducers Array structures Fourier transform infrared spectrum(FTIR) High sensitivity Micro-machined ultrasonic transducer Piezoelectric micromachined ultrasonic transducer (PMUT) Simultaneous detection Temperature coefficient of frequencies Ultrasensitive mass detections Graphene
spellingShingle	Atomic force microscopy Chemical sensors Fourier transform infrared spectroscopy Graphene oxide Humidity sensors Piezoelectric transducers Piezoelectricity Scanning electron microscopy Transducers Ultrasonic applications Ultrasonic transducers Array structures Fourier transform infrared spectrum(FTIR) High sensitivity Micro-machined ultrasonic transducer Piezoelectric micromachined ultrasonic transducer (PMUT) Simultaneous detection Temperature coefficient of frequencies Ultrasensitive mass detections Graphene Sun, C Shi, Q Yazici, M.S Lee, C Liu, Y Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
description	10.3390/s18124352
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Sun, C Shi, Q Yazici, M.S Lee, C Liu, Y
format	Article
author	Sun, C Shi, Q Yazici, M.S Lee, C Liu, Y
author_sort	Sun, C
title	Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
title_short	Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
title_full	Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
title_fullStr	Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
title_full_unstemmed	Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
title_sort	development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film
publisher	MDPI AG
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/175097
_version_	1800914340779393024

Development of a highly sensitive humidity sensor based on a piezoelectric micromachined ultrasonic transducer array functionalized with graphene oxide thin film

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