A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE

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Main Author:	ONG KOK HUA
Other Authors:	ELECTRICAL ENGINEERING
Format:	Theses and Dissertations
Published:	2020
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/179107
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-179107
record_format	dspace
spelling	sg-nus-scholar.10635-1791072020-11-19T13:57:17Z A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE ONG KOK HUA ELECTRICAL ENGINEERING PHANG JACOB CHEE HONG Master's MASTER OF ENGINEERING 2020-10-22T09:31:50Z 2020-10-22T09:31:50Z 1998 Thesis ONG KOK HUA (1998). A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/179107 CCK BATCHLOAD 20201023
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Master's
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING ONG KOK HUA
format	Theses and Dissertations
author	ONG KOK HUA
spellingShingle	ONG KOK HUA A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
author_sort	ONG KOK HUA
title	A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
title_short	A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
title_full	A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
title_fullStr	A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
title_full_unstemmed	A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE
title_sort	robust automatic focusing and astigmatism correction method for the scanning electron microscope
publishDate	2020
url	https://scholarbank.nus.edu.sg/handle/10635/179107
_version_	1686109043359219712

A ROBUST AUTOMATIC FOCUSING AND ASTIGMATISM CORRECTION METHOD FOR THE SCANNING ELECTRON MICROSCOPE

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