SURFACE MODIFICATION OF SI, GAAS AND INP BY 1-10 KEV AR AND N ION BOMBARDMENT

Ph.D

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Bibliographic Details
Main Author: PAN JISHENG
Other Authors: PHYSICS
Format: Theses and Dissertations
Published: 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/180545
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Institution: National University of Singapore