SURFACE MODIFICATION OF SI, GAAS AND INP BY 1-10 KEV AR AND N ION BOMBARDMENT
Ph.D
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Main Author: | PAN JISHENG |
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Other Authors: | PHYSICS |
Format: | Theses and Dissertations |
Published: |
2020
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Online Access: | https://scholarbank.nus.edu.sg/handle/10635/180545 |
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Institution: | National University of Singapore |
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