In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges

In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges

10.3390/s130709364

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Bibliographic Details
Main Authors:	Hassani, F.A, Tsuchiya, Y, Mizuta, H
Other Authors:	LIFE SCIENCES INSTITUTE
Format:	Review
Published:	2020
Subjects:	Direct current characteristics Fabrication and characterizations High frequency measurements High-frequency characterization Junction-less field-effect-transistor Metal oxide semiconductor Monolithically integrated Quality factors Characterization Fabrication Field effect transistors Monolithic integrated circuits Resonance Nanosensors
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/180790
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Institution:	National University of Singapore

Description
Summary:	10.3390/s130709364