In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges
10.3390/s130709364
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Review |
| Published: |
2020
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| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/180790 |
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| Institution: | National University of Singapore |