In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges
10.3390/s130709364
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2020
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sg-nus-scholar.10635-1807902023-08-29T09:21:36Z In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges Hassani, F.A Tsuchiya, Y Mizuta, H LIFE SCIENCES INSTITUTE Direct current characteristics Fabrication and characterizations High frequency measurements High-frequency characterization Junction-less field-effect-transistor Metal oxide semiconductor Monolithically integrated Quality factors Characterization Fabrication Field effect transistors Monolithic integrated circuits Resonance Nanosensors 10.3390/s130709364 Sensors (Switzerland) 13 7 9364-9387 2020-10-27T04:45:39Z 2020-10-27T04:45:39Z 2013 Review Hassani, F.A, Tsuchiya, Y, Mizuta, H (2013). In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges. Sensors (Switzerland) 13 (7) : 9364-9387. ScholarBank@NUS Repository. https://doi.org/10.3390/s130709364 1424-8220 https://scholarbank.nus.edu.sg/handle/10635/180790 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Unpaywall 20201031 |
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Singapore Singapore |
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Direct current characteristics Fabrication and characterizations High frequency measurements High-frequency characterization Junction-less field-effect-transistor Metal oxide semiconductor Monolithically integrated Quality factors Characterization Fabrication Field effect transistors Monolithic integrated circuits Resonance Nanosensors |
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Direct current characteristics Fabrication and characterizations High frequency measurements High-frequency characterization Junction-less field-effect-transistor Metal oxide semiconductor Monolithically integrated Quality factors Characterization Fabrication Field effect transistors Monolithic integrated circuits Resonance Nanosensors Hassani, F.A Tsuchiya, Y Mizuta, H In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| description |
10.3390/s130709364 |
| author2 |
LIFE SCIENCES INSTITUTE |
| author_facet |
LIFE SCIENCES INSTITUTE Hassani, F.A Tsuchiya, Y Mizuta, H |
| format |
Review |
| author |
Hassani, F.A Tsuchiya, Y Mizuta, H |
| author_sort |
Hassani, F.A |
| title |
In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| title_short |
In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| title_full |
In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| title_fullStr |
In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| title_full_unstemmed |
In-plane resonant nano-electro-mechanical sensors: A comprehensive study on design, fabrication and characterization challenges |
| title_sort |
in-plane resonant nano-electro-mechanical sensors: a comprehensive study on design, fabrication and characterization challenges |
| publishDate |
2020 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/180790 |
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1779152711291240448 |