Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices

Ph.D

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Bibliographic Details
Main Author: HE WEI
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/18231
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-182312024-10-26T12:32:22Z Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices HE WEI ELECTRICAL & COMPUTER ENGINEERING CHAN SIU HUNG, DANIEL high K, SONOS, memory, ALD, lanthanum, blocking oxide, Ph.D DOCTOR OF PHILOSOPHY 2010-09-30T18:00:42Z 2010-09-30T18:00:42Z 2010-01-22 Thesis HE WEI (2010-01-22). Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/18231 NOT_IN_WOS en
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic high K, SONOS, memory, ALD, lanthanum, blocking oxide,
spellingShingle high K, SONOS, memory, ALD, lanthanum, blocking oxide,
HE WEI
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
description Ph.D
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
HE WEI
format Theses and Dissertations
author HE WEI
author_sort HE WEI
title Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
title_short Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
title_full Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
title_fullStr Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
title_full_unstemmed Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
title_sort investigation of high-k dielectric films incorporated with lanthanum and their application in flash memory devices
publishDate 2010
url http://scholarbank.nus.edu.sg/handle/10635/18231
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