Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
Ph.D
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2010
|
Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/18231 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Language: | English |
id |
sg-nus-scholar.10635-18231 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-182312024-10-26T12:32:22Z Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices HE WEI ELECTRICAL & COMPUTER ENGINEERING CHAN SIU HUNG, DANIEL high K, SONOS, memory, ALD, lanthanum, blocking oxide, Ph.D DOCTOR OF PHILOSOPHY 2010-09-30T18:00:42Z 2010-09-30T18:00:42Z 2010-01-22 Thesis HE WEI (2010-01-22). Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/18231 NOT_IN_WOS en |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
language |
English |
topic |
high K, SONOS, memory, ALD, lanthanum, blocking oxide, |
spellingShingle |
high K, SONOS, memory, ALD, lanthanum, blocking oxide, HE WEI Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
description |
Ph.D |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING HE WEI |
format |
Theses and Dissertations |
author |
HE WEI |
author_sort |
HE WEI |
title |
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
title_short |
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
title_full |
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
title_fullStr |
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
title_full_unstemmed |
Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices |
title_sort |
investigation of high-k dielectric films incorporated with lanthanum and their application in flash memory devices |
publishDate |
2010 |
url |
http://scholarbank.nus.edu.sg/handle/10635/18231 |
_version_ |
1821215093843558400 |