A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation

• Main Authors: Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z
• Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
• Format: Article
• Published: American Institute of Physics 2020
• Subjects: Efficiency; Grinding (machining); Ion beams; Milling (machining); Polishing; Scanning electron microscopy; Transmission electron microscopy; Focused ion beam milling; Grinding and polishing; Membrane thickness; Nano-meter scale; Sample preparation; Sample preparation techniques; TEM sample preparation; Thinning methods; Fixtures (tooling)
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/183538
• Institution: National University of Singapore

10.1063/1.4980022