A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
10.1063/1.4980022
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American Institute of Physics
2020
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sg-nus-scholar.10635-1835382024-11-15T07:44:36Z A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation Wang, D Huang, Y Liu, B Zhu, L Lam, J Mai, Z ELECTRICAL AND COMPUTER ENGINEERING Efficiency Grinding (machining) Ion beams Milling (machining) Polishing Scanning electron microscopy Transmission electron microscopy Focused ion beam milling Grinding and polishing Membrane thickness Nano-meter scale Sample preparation Sample preparation techniques TEM sample preparation Thinning methods Fixtures (tooling) 10.1063/1.4980022 AIP Advances 7 4 45207 2020-11-17T06:34:09Z 2020-11-17T06:34:09Z 2017 Article Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z (2017). A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation. AIP Advances 7 (4) : 45207. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4980022 2158-3226 https://scholarbank.nus.edu.sg/handle/10635/183538 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ American Institute of Physics Unpaywall 20201031 |
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Efficiency Grinding (machining) Ion beams Milling (machining) Polishing Scanning electron microscopy Transmission electron microscopy Focused ion beam milling Grinding and polishing Membrane thickness Nano-meter scale Sample preparation Sample preparation techniques TEM sample preparation Thinning methods Fixtures (tooling) |
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Efficiency Grinding (machining) Ion beams Milling (machining) Polishing Scanning electron microscopy Transmission electron microscopy Focused ion beam milling Grinding and polishing Membrane thickness Nano-meter scale Sample preparation Sample preparation techniques TEM sample preparation Thinning methods Fixtures (tooling) Wang, D Huang, Y Liu, B Zhu, L Lam, J Mai, Z A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
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10.1063/1.4980022 |
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ELECTRICAL AND COMPUTER ENGINEERING |
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ELECTRICAL AND COMPUTER ENGINEERING Wang, D Huang, Y Liu, B Zhu, L Lam, J Mai, Z |
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Article |
author |
Wang, D Huang, Y Liu, B Zhu, L Lam, J Mai, Z |
author_sort |
Wang, D |
title |
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
title_short |
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
title_full |
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
title_fullStr |
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
title_full_unstemmed |
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation |
title_sort |
developed wedge fixtures assisted high precision tem samples pre-thinning method: towards the batch lamella preparation |
publisher |
American Institute of Physics |
publishDate |
2020 |
url |
https://scholarbank.nus.edu.sg/handle/10635/183538 |
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1821208035016572928 |