A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation

10.1063/1.4980022

Saved in:
Bibliographic Details
Main Authors: Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Article
Published: American Institute of Physics 2020
Subjects:
Online Access:https://scholarbank.nus.edu.sg/handle/10635/183538
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-183538
record_format dspace
spelling sg-nus-scholar.10635-1835382024-11-15T07:44:36Z A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation Wang, D Huang, Y Liu, B Zhu, L Lam, J Mai, Z ELECTRICAL AND COMPUTER ENGINEERING Efficiency Grinding (machining) Ion beams Milling (machining) Polishing Scanning electron microscopy Transmission electron microscopy Focused ion beam milling Grinding and polishing Membrane thickness Nano-meter scale Sample preparation Sample preparation techniques TEM sample preparation Thinning methods Fixtures (tooling) 10.1063/1.4980022 AIP Advances 7 4 45207 2020-11-17T06:34:09Z 2020-11-17T06:34:09Z 2017 Article Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z (2017). A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation. AIP Advances 7 (4) : 45207. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4980022 2158-3226 https://scholarbank.nus.edu.sg/handle/10635/183538 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ American Institute of Physics Unpaywall 20201031
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Efficiency
Grinding (machining)
Ion beams
Milling (machining)
Polishing
Scanning electron microscopy
Transmission electron microscopy
Focused ion beam milling
Grinding and polishing
Membrane thickness
Nano-meter scale
Sample preparation
Sample preparation techniques
TEM sample preparation
Thinning methods
Fixtures (tooling)
spellingShingle Efficiency
Grinding (machining)
Ion beams
Milling (machining)
Polishing
Scanning electron microscopy
Transmission electron microscopy
Focused ion beam milling
Grinding and polishing
Membrane thickness
Nano-meter scale
Sample preparation
Sample preparation techniques
TEM sample preparation
Thinning methods
Fixtures (tooling)
Wang, D
Huang, Y
Liu, B
Zhu, L
Lam, J
Mai, Z
A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
description 10.1063/1.4980022
author2 ELECTRICAL AND COMPUTER ENGINEERING
author_facet ELECTRICAL AND COMPUTER ENGINEERING
Wang, D
Huang, Y
Liu, B
Zhu, L
Lam, J
Mai, Z
format Article
author Wang, D
Huang, Y
Liu, B
Zhu, L
Lam, J
Mai, Z
author_sort Wang, D
title A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
title_short A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
title_full A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
title_fullStr A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
title_full_unstemmed A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
title_sort developed wedge fixtures assisted high precision tem samples pre-thinning method: towards the batch lamella preparation
publisher American Institute of Physics
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/183538
_version_ 1821208035016572928