Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications

10.1186/s11671-021-03494-2

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Bibliographic Details
Main Authors:	Guanyu Chen, Eric Jun Hao Cheung, Yu Cao, Jisheng Pan, Aaron J. Danner
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Published:	SpringerOpen 2021
Subjects:	Perovskite oxide Argon Inductively coupled plasma etching Photonics
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/188021
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-188021
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spelling	sg-nus-scholar.10635-1880212024-04-17T03:19:55Z Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications Guanyu Chen Eric Jun Hao Cheung Yu Cao Jisheng Pan Aaron J. Danner ELECTRICAL AND COMPUTER ENGINEERING INST OF MATERIALS RESEARCH & ENGINEERING Perovskite oxide Argon Inductively coupled plasma etching Photonics 10.1186/s11671-021-03494-2 Nanoscale Research Letter 16 2021-03-31T07:56:37Z 2021-03-31T07:56:37Z 2021-02-10 Article Guanyu Chen, Eric Jun Hao Cheung, Yu Cao, Jisheng Pan, Aaron J. Danner (2021-02-10). Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications. Nanoscale Research Letter 16. ScholarBank@NUS Repository. https://doi.org/10.1186/s11671-021-03494-2 1556276X https://scholarbank.nus.edu.sg/handle/10635/188021 SpringerOpen Elements
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Perovskite oxide Argon Inductively coupled plasma etching Photonics
spellingShingle	Perovskite oxide Argon Inductively coupled plasma etching Photonics Guanyu Chen Eric Jun Hao Cheung Yu Cao Jisheng Pan Aaron J. Danner Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
description	10.1186/s11671-021-03494-2
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Guanyu Chen Eric Jun Hao Cheung Yu Cao Jisheng Pan Aaron J. Danner
format	Article
author	Guanyu Chen Eric Jun Hao Cheung Yu Cao Jisheng Pan Aaron J. Danner
author_sort	Guanyu Chen
title	Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
title_short	Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
title_full	Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
title_fullStr	Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
title_full_unstemmed	Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
title_sort	analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
publisher	SpringerOpen
publishDate	2021
url	https://scholarbank.nus.edu.sg/handle/10635/188021
_version_	1800914780053045248

Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications

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