Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applications
10.1186/s11671-021-03494-2
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
SpringerOpen
2021
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| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/188021 |
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| Institution: | National University of Singapore |