Integration of MEMS IR detectors with MIR waveguides for sensing applications

10.1364/OE.381279

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Main Authors: Yazici, Mahmut Sami, Dong, Bowei, Hasan, Dihan, Sun, Fujun, Lee, Chengkuo
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Article
Language:English
Published: OPTICAL SOC AMER 2021
Subjects:
Online Access:https://scholarbank.nus.edu.sg/handle/10635/189721
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Institution: National University of Singapore
Language: English
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spelling sg-nus-scholar.10635-1897212024-11-15T02:26:07Z Integration of MEMS IR detectors with MIR waveguides for sensing applications Yazici, Mahmut Sami Dong, Bowei Hasan, Dihan Sun, Fujun Lee, Chengkuo ELECTRICAL AND COMPUTER ENGINEERING Assoc Prof Chengkuo Lee Science & Technology Physical Sciences Optics SUBWAVELENGTH GRATING COUPLER ALUMINUM NITRIDE NITROUS-OXIDE MU-M RESONATORS 10.1364/OE.381279 OPTICS EXPRESS 28 8 11524-11537 2021-04-19T06:31:45Z 2021-04-19T06:31:45Z 2020-04-13 2021-04-15T07:09:18Z Article Yazici, Mahmut Sami, Dong, Bowei, Hasan, Dihan, Sun, Fujun, Lee, Chengkuo (2020-04-13). Integration of MEMS IR detectors with MIR waveguides for sensing applications. OPTICS EXPRESS 28 (8) : 11524-11537. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.381279 10944087 https://scholarbank.nus.edu.sg/handle/10635/189721 en OPTICAL SOC AMER Elements
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic Science & Technology
Physical Sciences
Optics
SUBWAVELENGTH GRATING COUPLER
ALUMINUM NITRIDE
NITROUS-OXIDE
MU-M
RESONATORS
spellingShingle Science & Technology
Physical Sciences
Optics
SUBWAVELENGTH GRATING COUPLER
ALUMINUM NITRIDE
NITROUS-OXIDE
MU-M
RESONATORS
Yazici, Mahmut Sami
Dong, Bowei
Hasan, Dihan
Sun, Fujun
Lee, Chengkuo
Integration of MEMS IR detectors with MIR waveguides for sensing applications
description 10.1364/OE.381279
author2 ELECTRICAL AND COMPUTER ENGINEERING
author_facet ELECTRICAL AND COMPUTER ENGINEERING
Yazici, Mahmut Sami
Dong, Bowei
Hasan, Dihan
Sun, Fujun
Lee, Chengkuo
format Article
author Yazici, Mahmut Sami
Dong, Bowei
Hasan, Dihan
Sun, Fujun
Lee, Chengkuo
author_sort Yazici, Mahmut Sami
title Integration of MEMS IR detectors with MIR waveguides for sensing applications
title_short Integration of MEMS IR detectors with MIR waveguides for sensing applications
title_full Integration of MEMS IR detectors with MIR waveguides for sensing applications
title_fullStr Integration of MEMS IR detectors with MIR waveguides for sensing applications
title_full_unstemmed Integration of MEMS IR detectors with MIR waveguides for sensing applications
title_sort integration of mems ir detectors with mir waveguides for sensing applications
publisher OPTICAL SOC AMER
publishDate 2021
url https://scholarbank.nus.edu.sg/handle/10635/189721
_version_ 1821206851072557056