Integration of MEMS IR detectors with MIR waveguides for sensing applications
10.1364/OE.381279
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Main Authors: | Yazici, Mahmut Sami, Dong, Bowei, Hasan, Dihan, Sun, Fujun, Lee, Chengkuo |
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Other Authors: | DEPT OF ELECTRICAL & COMPUTER ENGG |
Format: | Article |
Language: | English |
Published: |
OPTICAL SOC AMER
2021
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Subjects: | |
Online Access: | https://scholarbank.nus.edu.sg/handle/10635/189721 |
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Institution: | National University of Singapore |
Language: | English |
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