Integration of MEMS IR detectors with MIR waveguides for sensing applications

10.1364/OE.381279

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Bibliographic Details
Main Authors:	Yazici, Mahmut Sami, Dong, Bowei, Hasan, Dihan, Sun, Fujun, Lee, Chengkuo
Other Authors:	DEPT OF ELECTRICAL & COMPUTER ENGG
Format:	Article
Language:	English
Published:	OPTICAL SOC AMER 2021
Subjects:	Science & Technology Physical Sciences Optics SUBWAVELENGTH GRATING COUPLER ALUMINUM NITRIDE NITROUS-OXIDE MU-M RESONATORS
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/189721
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Institution:	National University of Singapore
Language:	English

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