Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform

10.1364/OE.27.019815

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Bibliographic Details
Main Authors: Dong, Bowei, Luo, Xianshu, Zhu, Shiyang, Hu, Ting, Li, Mo, Hasan, Dihan, Zhang, Li, Chua, Soo Jin, Wei, Jingxuan, Chang, Yuhua, Ma, Yiming, Vachon, Philippe, Lo, Guo-Qiang, Ang, Kah Wee, Kwong, Dim-Lee, Lee, Chengkuo
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Article
Language:English
Published: OPTICAL SOC AMER 2021
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Online Access:https://scholarbank.nus.edu.sg/handle/10635/190060
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Institution: National University of Singapore
Language: English
Description
Summary:10.1364/OE.27.019815