Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform

• Main Authors: Dong, Bowei, Luo, Xianshu, Zhu, Shiyang, Hu, Ting, Li, Mo, Hasan, Dihan, Zhang, Li, Chua, Soo Jin, Wei, Jingxuan, Chang, Yuhua, Ma, Yiming, Vachon, Philippe, Lo, Guo-Qiang, Ang, Kah Wee, Kwong, Dim-Lee, Lee, Chengkuo
• Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
• Format: Article
• Language: English
• Published: OPTICAL SOC AMER 2021
• Subjects: Science & Technology; Physical Sciences; Optics
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/190060
• Institution: National University of Singapore

10.1364/OE.27.019815