Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform

10.1364/OE.27.019815

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Bibliographic Details
Main Authors:	Dong, Bowei, Luo, Xianshu, Zhu, Shiyang, Hu, Ting, Li, Mo, Hasan, Dihan, Zhang, Li, Chua, Soo Jin, Wei, Jingxuan, Chang, Yuhua, Ma, Yiming, Vachon, Philippe, Lo, Guo-Qiang, Ang, Kah Wee, Kwong, Dim-Lee, Lee, Chengkuo
Other Authors:	ELECTRICAL AND COMPUTER ENGINEERING
Format:	Article
Language:	English
Published:	OPTICAL SOC AMER 2021
Subjects:	Science & Technology Physical Sciences Optics
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/190060
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-190060
record_format	dspace
spelling	sg-nus-scholar.10635-1900602024-04-25T03:37:03Z Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform Dong, Bowei Luo, Xianshu Zhu, Shiyang Hu, Ting Li, Mo Hasan, Dihan Zhang, Li Chua, Soo Jin Wei, Jingxuan Chang, Yuhua Ma, Yiming Vachon, Philippe Lo, Guo-Qiang Ang, Kah Wee Kwong, Dim-Lee Lee, Chengkuo ELECTRICAL AND COMPUTER ENGINEERING Science & Technology Physical Sciences Optics 10.1364/OE.27.019815 OPTICS EXPRESS 27 14 19815-19826 2021-04-22T05:19:15Z 2021-04-22T05:19:15Z 2019-07-08 2021-04-22T04:15:56Z Article Dong, Bowei, Luo, Xianshu, Zhu, Shiyang, Hu, Ting, Li, Mo, Hasan, Dihan, Zhang, Li, Chua, Soo Jin, Wei, Jingxuan, Chang, Yuhua, Ma, Yiming, Vachon, Philippe, Lo, Guo-Qiang, Ang, Kah Wee, Kwong, Dim-Lee, Lee, Chengkuo (2019-07-08). Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform. OPTICS EXPRESS 27 (14) : 19815-19826. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.27.019815 10944087 15394794 https://scholarbank.nus.edu.sg/handle/10635/190060 en OPTICAL SOC AMER Elements
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Science & Technology Physical Sciences Optics
spellingShingle	Science & Technology Physical Sciences Optics Dong, Bowei Luo, Xianshu Zhu, Shiyang Hu, Ting Li, Mo Hasan, Dihan Zhang, Li Chua, Soo Jin Wei, Jingxuan Chang, Yuhua Ma, Yiming Vachon, Philippe Lo, Guo-Qiang Ang, Kah Wee Kwong, Dim-Lee Lee, Chengkuo Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
description	10.1364/OE.27.019815
author2	ELECTRICAL AND COMPUTER ENGINEERING
author_facet	ELECTRICAL AND COMPUTER ENGINEERING Dong, Bowei Luo, Xianshu Zhu, Shiyang Hu, Ting Li, Mo Hasan, Dihan Zhang, Li Chua, Soo Jin Wei, Jingxuan Chang, Yuhua Ma, Yiming Vachon, Philippe Lo, Guo-Qiang Ang, Kah Wee Kwong, Dim-Lee Lee, Chengkuo
format	Article
author	Dong, Bowei Luo, Xianshu Zhu, Shiyang Hu, Ting Li, Mo Hasan, Dihan Zhang, Li Chua, Soo Jin Wei, Jingxuan Chang, Yuhua Ma, Yiming Vachon, Philippe Lo, Guo-Qiang Ang, Kah Wee Kwong, Dim-Lee Lee, Chengkuo
author_sort	Dong, Bowei
title	Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
title_short	Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
title_full	Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
title_fullStr	Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
title_full_unstemmed	Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
title_sort	thermal annealing study of the mid-infrared aluminum nitride on insulator (alnoi) photonics platform
publisher	OPTICAL SOC AMER
publishDate	2021
url	https://scholarbank.nus.edu.sg/handle/10635/190060
_version_	1800914796770492416

Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform

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