Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode

10.3390/coatings10060586

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Bibliographic Details
Main Authors:	Guo, W., Anantharajan, S.K., Liu, K., Deng, H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	MDPI AG 2021
Subjects:	Electrochemical oxidation Oxidation behaviour Potentiostatic mode Silicon
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/197726
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-197726
record_format	dspace
spelling	sg-nus-scholar.10635-1977262024-04-04T02:07:30Z Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode Guo, W. Anantharajan, S.K. Liu, K. Deng, H. MECHANICAL ENGINEERING Electrochemical oxidation Oxidation behaviour Potentiostatic mode Silicon 10.3390/coatings10060586 Coatings 10 6 Jan-14 2021-08-18T04:01:25Z 2021-08-18T04:01:25Z 2020 Article Guo, W., Anantharajan, S.K., Liu, K., Deng, H. (2020). Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode. Coatings 10 (6) : Jan-14. ScholarBank@NUS Repository. https://doi.org/10.3390/coatings10060586 20796412 https://scholarbank.nus.edu.sg/handle/10635/197726 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ MDPI AG Scopus OA2020
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrochemical oxidation Oxidation behaviour Potentiostatic mode Silicon
spellingShingle	Electrochemical oxidation Oxidation behaviour Potentiostatic mode Silicon Guo, W. Anantharajan, S.K. Liu, K. Deng, H. Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
description	10.3390/coatings10060586
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Guo, W. Anantharajan, S.K. Liu, K. Deng, H.
format	Article
author	Guo, W. Anantharajan, S.K. Liu, K. Deng, H.
author_sort	Guo, W.
title	Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
title_short	Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
title_full	Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
title_fullStr	Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
title_full_unstemmed	Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
title_sort	investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
publisher	MDPI AG
publishDate	2021
url	https://scholarbank.nus.edu.sg/handle/10635/197726
_version_	1800914921776480256

Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode

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