Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode
10.3390/coatings10060586
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Main Authors: | Guo, W., Anantharajan, S.K., Liu, K., Deng, H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
MDPI AG
2021
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Subjects: | |
Online Access: | https://scholarbank.nus.edu.sg/handle/10635/197726 |
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Institution: | National University of Singapore |
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