Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode

Investigation of electrochemical oxidation behaviors and mechanism of single-crystal silicon (100) wafer under potentiostatic mode

10.3390/coatings10060586

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Bibliographic Details
Main Authors: Guo, W., Anantharajan, S.K., Liu, K., Deng, H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: MDPI AG 2021
Subjects:
Electrochemical oxidation
Oxidation behaviour
Potentiostatic mode
Silicon
Online Access:https://scholarbank.nus.edu.sg/handle/10635/197726
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Institution: National University of Singapore
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