Dynamic motion detection techniques for micromechanical devices and their application in long-term testing

• Main Author: WONG CHEE LEONG
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Theses and Dissertations
• Language: English
• Published: 2011
• Subjects: phonon, SEM, dynamic motion, micromechanical resonators, long-term testing, fatigue
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/22100
• Institution: National University of Singapore

Ph.D