An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators

An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators

10.1117/12.809995

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Bibliographic Details
Main Authors: Wong, C.-L., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Automated testing
Long-term frequency stability
MEMS resonators
Phonon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83455
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83455

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