An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators
10.1117/12.809995
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sg-nus-scholar.10635-834552023-10-29T20:59:53Z An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators Wong, C.-L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Automated testing Long-term frequency stability MEMS resonators Phonon 10.1117/12.809995 Proceedings of SPIE - The International Society for Optical Engineering 7206 - PSISD 2014-10-07T04:41:25Z 2014-10-07T04:41:25Z 2009 Conference Paper Wong, C.-L., Palaniapan, M. (2009). An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators. Proceedings of SPIE - The International Society for Optical Engineering 7206 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.809995 9780819474520 0277786X http://scholarbank.nus.edu.sg/handle/10635/83455 000285331000012 Scopus |
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Automated testing Long-term frequency stability MEMS resonators Phonon |
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Automated testing Long-term frequency stability MEMS resonators Phonon Wong, C.-L. Palaniapan, M. An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
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10.1117/12.809995 |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Wong, C.-L. Palaniapan, M. |
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Conference or Workshop Item |
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Wong, C.-L. Palaniapan, M. |
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Wong, C.-L. |
title |
An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
title_short |
An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
title_full |
An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
title_fullStr |
An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
title_full_unstemmed |
An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
title_sort |
acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/83455 |
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1781784358716178432 |