Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization

Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization

10.1109/SENSOR.2007.4300145

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Bibliographic Details
Main Authors: Wong, W.-K., Wong, C.-L., Palaniapan, M., Tay, F.E.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Acoustic phonons
Non-destructive testing
Resonators
RF switches
SEM
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71149
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/71149

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