Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization

• Main Authors: Wong, W.-K., Wong, C.-L., Palaniapan, M., Tay, F.E.H.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Acoustic phonons; Non-destructive testing; Resonators; RF switches; SEM
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71149
• Institution: National University of Singapore

10.1109/SENSOR.2007.4300145