Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization

Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization

10.1109/SENSOR.2007.4300145

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Bibliographic Details
Main Authors: Wong, W.-K., Wong, C.-L., Palaniapan, M., Tay, F.E.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Acoustic phonons
Non-destructive testing
Resonators
RF switches
SEM
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71149
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Institution: National University of Singapore
id sg-nus-scholar.10635-71149
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spelling sg-nus-scholar.10635-711492015-02-19T06:56:14Z Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization Wong, W.-K. Wong, C.-L. Palaniapan, M. Tay, F.E.H. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Acoustic phonons Non-destructive testing Resonators RF switches SEM 10.1109/SENSOR.2007.4300145 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems 371-374 2014-06-19T03:20:23Z 2014-06-19T03:20:23Z 2007 Conference Paper Wong, W.-K.,Wong, C.-L.,Palaniapan, M.,Tay, F.E.H. (2007). Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems : 371-374. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/SENSOR.2007.4300145" target="_blank">https://doi.org/10.1109/SENSOR.2007.4300145</a> 1424408423 http://scholarbank.nus.edu.sg/handle/10635/71149 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Acoustic phonons
Non-destructive testing
Resonators
RF switches
SEM
spellingShingle Acoustic phonons
Non-destructive testing
Resonators
RF switches
SEM
Wong, W.-K.
Wong, C.-L.
Palaniapan, M.
Tay, F.E.H.
Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
description 10.1109/SENSOR.2007.4300145
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Wong, W.-K.
Wong, C.-L.
Palaniapan, M.
Tay, F.E.H.
format Conference or Workshop Item
author Wong, W.-K.
Wong, C.-L.
Palaniapan, M.
Tay, F.E.H.
author_sort Wong, W.-K.
title Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
title_short Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
title_full Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
title_fullStr Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
title_full_unstemmed Non-destructive functionality and reliability assessment of dynamic MEMS using acoustic phonon characterization
title_sort non-destructive functionality and reliability assessment of dynamic mems using acoustic phonon characterization
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71149
_version_ 1681087330947956736

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