Method and apparatus for measuring quantitative voltage contrast

US5486769

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Bibliographic Details
Main Authors: CHIM, WAI K., PHANG, JACOB C. H., CHAN, DANIEL S. H.
Other Authors: ELECTRICAL ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32540
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Institution: National University of Singapore