Method and apparatus for measuring quantitative voltage contrast
US5486769
Saved in:
Main Authors: | CHIM, WAI K., PHANG, JACOB C. H., CHAN, DANIEL S. H. |
---|---|
Other Authors: | ELECTRICAL ENGINEERING |
Format: | Patent |
Published: |
2012
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32540 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Error voltage components in quantitative voltage contrast measurement systems
by: Chan, D.S.H., et al.
Published: (2014) -
A novel correction scheme for quantitative voltage contrast measurements using low extraction fields in the scanning electron microscope
by: Chim, W.K.
Published: (2014) -
A neural-network-based local-field-effect correction scheme for quantitative voltage contrast measurements in the scanning electron microscope
by: Chim, W.K.
Published: (2014) -
ELECTRON TRAJECTORY TRACKING ALGORITHMS FOR ANALYSING VOLTAGE CONTRAST SIGNALS IN THE SCANNING ELECTRON MICROSCOPE.
by: Chim, W.K., et al.
Published: (2014) -
Investigation of some aspects of the liquid crystal optical voltage contrast technique for integrated circuit physical analysis
by: Chim, W.K., et al.
Published: (2014)