In-line process monitoring using micro-raman spectroscopy

In-line process monitoring using micro-raman spectroscopy

US5956137

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Bibliographic Details
Main Authors: LIM, ENG HUA, PEY, KIN-LEONG, WONG, HARIANTO, LEE, KONG HEAN
Other Authors: ELECTRICAL ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32565
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Institution: National University of Singapore
id sg-nus-scholar.10635-32565
record_format dspace
spelling sg-nus-scholar.10635-325652015-07-29T07:03:40Z In-line process monitoring using micro-raman spectroscopy LIM, ENG HUA PEY, KIN-LEONG WONG, HARIANTO LEE, KONG HEAN ELECTRICAL ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US5956137 Granted Patent 2012-05-02T02:27:06Z 2012-05-02T02:27:06Z 1999-09-21 Patent LIM, ENG HUA,PEY, KIN-LEONG,WONG, HARIANTO,LEE, KONG HEAN (1999-09-21). In-line process monitoring using micro-raman spectroscopy. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32565 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US5956137
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
LIM, ENG HUA
PEY, KIN-LEONG
WONG, HARIANTO
LEE, KONG HEAN
format Patent
author LIM, ENG HUA
PEY, KIN-LEONG
WONG, HARIANTO
LEE, KONG HEAN
spellingShingle LIM, ENG HUA
PEY, KIN-LEONG
WONG, HARIANTO
LEE, KONG HEAN
In-line process monitoring using micro-raman spectroscopy
author_sort LIM, ENG HUA
title In-line process monitoring using micro-raman spectroscopy
title_short In-line process monitoring using micro-raman spectroscopy
title_full In-line process monitoring using micro-raman spectroscopy
title_fullStr In-line process monitoring using micro-raman spectroscopy
title_full_unstemmed In-line process monitoring using micro-raman spectroscopy
title_sort in-line process monitoring using micro-raman spectroscopy
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32565
_version_ 1681081246677991424

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