In-line process monitoring using micro-raman spectroscopy
US5956137
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sg-nus-scholar.10635-325652015-07-29T07:03:40Z In-line process monitoring using micro-raman spectroscopy LIM, ENG HUA PEY, KIN-LEONG WONG, HARIANTO LEE, KONG HEAN ELECTRICAL ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US5956137 Granted Patent 2012-05-02T02:27:06Z 2012-05-02T02:27:06Z 1999-09-21 Patent LIM, ENG HUA,PEY, KIN-LEONG,WONG, HARIANTO,LEE, KONG HEAN (1999-09-21). In-line process monitoring using micro-raman spectroscopy. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32565 NOT_IN_WOS PatSnap |
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Singapore |
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US5956137 |
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ELECTRICAL ENGINEERING |
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ELECTRICAL ENGINEERING LIM, ENG HUA PEY, KIN-LEONG WONG, HARIANTO LEE, KONG HEAN |
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Patent |
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LIM, ENG HUA PEY, KIN-LEONG WONG, HARIANTO LEE, KONG HEAN |
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LIM, ENG HUA PEY, KIN-LEONG WONG, HARIANTO LEE, KONG HEAN In-line process monitoring using micro-raman spectroscopy |
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LIM, ENG HUA |
title |
In-line process monitoring using micro-raman spectroscopy |
title_short |
In-line process monitoring using micro-raman spectroscopy |
title_full |
In-line process monitoring using micro-raman spectroscopy |
title_fullStr |
In-line process monitoring using micro-raman spectroscopy |
title_full_unstemmed |
In-line process monitoring using micro-raman spectroscopy |
title_sort |
in-line process monitoring using micro-raman spectroscopy |
publishDate |
2012 |
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http://scholarbank.nus.edu.sg/handle/10635/32565 |
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