Method to form shallow trench isolation structures for borderless contacts in an integrated circuit

Method to form shallow trench isolation structures for borderless contacts in an integrated circuit

US6225225

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Main Authors: GOH, KENNY HUA KOOI, CHAN, LAP, YAP, KOK SIONG
Other Authors: CENTRE FOR WIRELESS COMMUNICATIONS
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32590
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Institution: National University of Singapore
id sg-nus-scholar.10635-32590
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spelling sg-nus-scholar.10635-325902015-07-29T07:03:42Z Method to form shallow trench isolation structures for borderless contacts in an integrated circuit GOH, KENNY HUA KOOI CHAN, LAP YAP, KOK SIONG CENTRE FOR WIRELESS COMMUNICATIONS CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) NANYANG TECHNOLOGICAL UNIVERSITY OF SINGAPORE US6225225 Granted Patent 2012-05-02T02:27:28Z 2012-05-02T02:27:28Z 2001-05-01 Patent GOH, KENNY HUA KOOI,CHAN, LAP,YAP, KOK SIONG (2001-05-01). Method to form shallow trench isolation structures for borderless contacts in an integrated circuit. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32590 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6225225
author2 CENTRE FOR WIRELESS COMMUNICATIONS
author_facet CENTRE FOR WIRELESS COMMUNICATIONS
GOH, KENNY HUA KOOI
CHAN, LAP
YAP, KOK SIONG
format Patent
author GOH, KENNY HUA KOOI
CHAN, LAP
YAP, KOK SIONG
spellingShingle GOH, KENNY HUA KOOI
CHAN, LAP
YAP, KOK SIONG
Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
author_sort GOH, KENNY HUA KOOI
title Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
title_short Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
title_full Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
title_fullStr Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
title_full_unstemmed Method to form shallow trench isolation structures for borderless contacts in an integrated circuit
title_sort method to form shallow trench isolation structures for borderless contacts in an integrated circuit
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32590
_version_ 1681081251200499712

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